超高精度真空壓力PID控制裝置
Ultra High Precision Vacuum Pressure PID Controller
上海依陽公司推出的超高精度真空壓力PID控制裝置是一種采用電氣比例閥，但通過外置超高精度傳感器和PID控制器，實現(xiàn)真空壓力超高精度控制的裝置，由此可實現(xiàn)真空、微正壓、高壓和超高壓范圍內(nèi)的精密控制，可實現(xiàn)優(yōu)于±0.1%的真空壓力超高精度控制，填補了國內(nèi)工業(yè)應用領域內(nèi)超高精度真空壓力控制的空白，并可完全替代國外相關產(chǎn)品。特別是超高精度真空壓力PID控制裝置還可與微泄漏閥搭配，可實現(xiàn)超高真空條件下的微流量調(diào)節(jié)和超高真空度精密控制。
一、微正壓超高精度PID控制裝置
Micro Positive Pressure Ultra High Precision PID Control Device
微正壓控制裝置主要包括微正壓電氣比例閥和相應量程的外接超高精度壓力傳感器，通過超高精度的PID控制器可實現(xiàn)優(yōu)于±0.1%的精密控制。
二、傳統(tǒng)電動閥門執(zhí)行器的升級換代
Upgrading of Traditional Electric Valve Actuators
傳統(tǒng)電動調(diào)節(jié)器一般是電動致動器、電動閥門定位器和閥門結構，結合傳感器和PID控制器構成單回路壓力或溫度控制系統(tǒng)。存在問題是運行速度慢、對PID控制信號響應滯后，壓力和溫度波動大。
采用閥門定位器形式的電動減壓閥蒸汽溫度控制結構
傳統(tǒng)閥門定位器形式的電動減壓閥蒸汽溫度控制波動
升級換代技術則采用串級控制結構，溫度傳感器、氣動減壓閥、電氣比例閥和串級PID調(diào)節(jié)器組成一個雙回路閉環(huán)控制系統(tǒng)。新型控制系統(tǒng)明顯提高控制精度和縮短控制時間。
傳感器、超高精度PID控制器、電氣比例閥和氣動減壓閥構成的串行控制結構
串級控制系統(tǒng)的溫度波動
三、電氣比例閥超高精度壓力PID控制裝置
Ultra-High Precision Pressure PID Control Device of Electric Proportional Valve
電氣比例閥超高精度壓力控制裝置主要包括電氣比例閥和相應量程的外接超高精度壓力傳感器，通過超高精度的PID控制器可實現(xiàn)優(yōu)于±0.1%的精密控制。
四、先導式氣動減壓閥（背壓閥）的精密高壓控制
Precision High Pressure Control of Pilot Pneumatic Pressure Reducing Valve (Back Pressure Valve)
五、連續(xù)流反應器和微通道反應器的精密壓力控制
Precise Pressure Control Solutions for Continuous Flow Reactors and Microchannel Reactors
六、超低漏率可變泄漏閥（微流量調(diào)節(jié)閥）及其超高真空度控制裝置
Ultra-Low Leakage Rate Variable Leak Valve (Micro-Flow Regulating Valve) and Ultra-High Vacuum Control Device
七、微流控芯片壓力驅(qū)動進樣系統(tǒng)的壓力和流量超高精度控制裝置
Ultra-High Precision Control Device for Pressure and Flow of Microfluidic Chip Pressure-Driven Sampling System
八、離體肺真空壓力（正負壓）通氣裝置
Ex Vivo Lung Vacuum Pressure (Positive and Negative Pressure) Ventilation Device
九、應用視頻
Appplication Video
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真空控制系統(tǒng)在PVT法碳化硅單晶生長設備中的應用——國產(chǎn)化替代解決方案 |
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十、應用文章
Appplication Notes
（1）SMC IRV系列手動真空調(diào)節(jié)閥低壓控制性能考核試驗
SMC IRV Vacuum Regulator Low Pressure Control Performance Assessment Test
（2）工業(yè)應用中0.1%超高精度PID控制器的實現(xiàn)及其關鍵指標分析
Realization of 0.1% Ultra-high Precision PID Controller in Industry and Analysis of Its KeyParameters
（3）表壓0.1~0.6MPa范圍內(nèi)0.1%超高精度壓力控制解決方案及其考核試驗結果
0.1% Ultra-High-Precision Pressure Control Solution in the Range of Gauge Pressure 0.1~0.6MPa and Its Assessment Test Results
（4）微正壓0.1MPa以下的超高精度PID控制及其演示驗證結果
Ultra High Precision PID Control with Micro-Positive Pressure Below 0.1MPa and Its Demonstration and Verification Results
Basic Concept and Application Method of Measurement and Control Accuracy of Pressure Sensor and Electric Proportional Valve
Contrastive Assessment Test of Pressure Control Accuracy of Three Types of Electrical Proportional Valves
（7）PVT法碳化硅SIC晶體生長工藝高精度壓力控制解決方案及其配套裝置的國產(chǎn)化替代
High Precision Pressure Control Solution for PVT Method SIC Crystal Growth Pocess and Localized Replacement of Its Supporting Equipments
（8）采用電氣比例閥串級控制法實現(xiàn)化學機械拋光（CMP）的超高精密壓力控制
Ultra-High Precision Pressure Control of Chemical Mechanical Polishing is Realized by Cascade Control of Electric Proportional Valve
（9）超長管件注塑過程中采用串級控制實現(xiàn)高壓壓力精密控制的解決方案
Solution of Cascade Control to Realize High-Pressure Precision Control in the Injection Molding Process of Super-Long Pipe Fittings
（10）超高溫高壓流變儀用艾默生TESCOM ER5000壓力控制系統(tǒng)的國產(chǎn)化替代方案
Domestic Alternative Scheme of TESCOM ER5000 High Precision Pressure Control System for High Pressure Rheometer
（11）徹底講清電氣轉(zhuǎn)換器（I-P電流型、E-P電壓型）與電氣比例閥的區(qū)別
Thoroughly Explain the Difference Between Electrical Converter (I-P Current Type and E-P Voltage Type) and Electrical Proportional Valve.
（12）使用壓力控制器和電氣比例閥組成串級回路實現(xiàn)一次性生物反應器袋安全高精度快速充氣
Using Pressure Controller and Electric Proportional Valve to Form Cascade Loop to Realize High-Precision Inflating Single Use Bioreactor Bag
（13）采用電氣比例閥代替電動閥門執(zhí)行器實現(xiàn)輪胎硫化過程中的飽和蒸汽外溫變溫精密控制
Application of Ultra-Precision PID Cascade Controller and Electric Proportional Valve in Temperature Control of Tire Vulcanization Saturated Steam.
Solution of High-Precision Pressure and Temperature Control in Sous Vide Device
（15）采用壓力串級控制系統(tǒng)實現(xiàn)氣動馬達的精密調(diào)節(jié)
Solution to Realize Hgh Precision Regulation of Pneumatic Motor by Pressure Cascade Control Method
Special Functions of Super Precision PID Controller Part 1: Remote Set Point Function and Its Application
（17）閥門定位器的技術發(fā)展及其更新?lián)Q代——電氣比例閥
Technical Development and Upgrading of Valve Positioner—— Electric Proportional Valve Pressure Controller
（18）采用泊肅葉壓力衰減法代替塞規(guī)進行高精度孔徑測量的解決方案
The Solution of Using Poiseuille Pressure Decay Method to Replace Plug Gauge for High Precision Aperture Measurement（19）半導體低溫工藝中制冷系統(tǒng)的壓力和溫度準確控制解決方案
Solution for Accurate Control of Pressure and Temperature of Refrigeration System in Semiconductor Low Temperature Process
（20）反重力調(diào)壓鑄造爐真空壓力控制技術——高精度快速壓力調(diào)節(jié)解決方案
Vacuum Pressure Control Technology of Counter Gravity Casting —— High Precision and Fast Pressure Regulating Solution
（21）醫(yī)用導管和球囊成型過程中的自動和手動精密壓力控制
Automatic and Manual Precise Pressure Control In Medical Catheter and Balloon Molding Process
（22）電動針閥和電氣比例閥在流動液氮氣體低溫溫度控制中的應用
Application of Electric Needle Valve and Electric Proportional Valve in Low Temperature Control of Flowing Liquid Nitrogen Gas
High Precision Displacement and Pressure Control Solution in Gasbag Polishing
Programmable Fully Automatic Precision Pressure Control Device for Beer Fermentation Tanks
（25）正負壓差控制方法在X射線探測器薄膜窗口材料彈性模量測量中的應用
Solution of Vacuum Pressure Control in Mechanical Properties Test of Window Film Material of X-ray Senor
（26）半導體熱處理設備微環(huán)境中的精密微正壓控制解決方案
Precise Micro-Positive Pressure Control Solution In Micro-Environment of Semiconductor Heat Treatment Equipments
（27）印刷和噴繪過程中高精度油墨流量和壓力的串級控制解決方案
Cascade Control Solution of High Precision Ink Flow and Pressure in Printing and Inkjet Equipment
（28）隱形牙齒矯治器熱成型工藝中的正負壓力精密控制解決方案
Precision Control Solutions for Positive and Negative Pressure in the Thermoforming Process of Invisible Dental Appliances
（29）超高真空度控制用安捷倫和VAT電動可變泄漏閥的國產(chǎn)化替代解決方案
Domestic Alternative Solution of Agilent and VAT Electric Variable Leakage Valve for Ultra-High Vacuum Control
（30）全量程真空壓力綜合測量系統(tǒng)的高精度控制解決方案
High-Precision Control Solution of Full-Range Vacuum Pressure Comprehensive Measurement Aystem
（31）連續(xù)流反應器和微通道反應器的精密壓力控制解決方案
Precise Pressure Control Solutions for Continuous Flow Reactors and Microchannel Reactors
Detailed Analysis and Comparison of the Performance of Microfluidic Pressure Pump and Injection Pump
（33）微流控芯片氣壓驅(qū)動進樣系統(tǒng)中高精度流量調(diào)節(jié)的串級控制解決方案
Cascade Control Solution of Ultra-High Precision Flow Regulation In Microfluidic Chip Air-Driven Sampling System
Solution of Vacuum and Pressure Control In Ex Vivo Lung Ventilation Device
Automatic Control Solution for Intraoperative Management of Endotracheal Tube Cuff Pressure
（36）透射電子顯微鏡樣品桿流體輸送中的真空壓力和流量精密控制解決方案
Precise Control Solution of Vacuum Pressure and Flow Rate in Fluid Transportation of Transmission Electron Microscope Sample Holder
Temperature and Pressure Tracking Control Solution of ARC Accelerated Rate Adiabatic Calorimeter
Precise Control Solution of Pressure and Temperature in Low Pressure Boiling Heat Transfer Two-Phase Heat Sink
（39）采用夾管閥實現(xiàn)無菌流體系統(tǒng)中的高精度壓力和流量控制解決方案
Solution for High-Precision Pressure and Flow Control in Aseptic Fluid Systems Using a Pinch Valve
（40）光聲法氣體檢測系統(tǒng)的高精度壓力控制解決方案
High Precision Air Pressure Control Solution of Photoacoustic Gas Detection System